Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow
Name
Hu-2009-Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow.pdf
Size
339.04 KB
Format
Adobe PDF
Checksum (MD5)
1e4132ac858d472636aea5ff2abc48db
Author(s)
Hu, Juejun
Feng, Ning-Ning
Agarwal, Anuradha Murthy
Kimerling, Lionel C.
Carlie, Nathan
Petit, Laeticia
Richardson, Kathleen
Date Issued
August 2009
Journal
Proceedings of the Conference on Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference
Publisher
Institute of Electrical and Electronics Engineers
Citation
Juejun Hu et al. “Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow.” Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on. 2009. 1-2. © 2009 OSA/CLEO/IQEC 2009 ©2009 IEEE
Version
Final published version
Abstract
A rapid thermal reflow technique is applied to high-index-contrast, sub-micron waveguides in As[subscript 2]S[subscript 3] chalcogenide glass to reduce sidewall roughness and associated optical scattering loss. Up to 50% optical loss reduction after reflow treatment is achieved.
MIT Department
MIT Materials Research Laboratory
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Massachusetts Institute of Technology. Microphotonics Center
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