SOI-Supported Microdevice for Hydrogen Purification Using Palladium–Silver Membranes
Name
Deshpande-2010-SOI-Supported microdevice for hydrogen purification using palladiumsilver membranes.pdf
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Author(s)
Deshpande, Kishori
Meldon, Jerry H.
Schmidt, Martin Arnold
Jensen, Klavs F.
Date Issued
April 2010
Journal
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Deshpande, Kishori et al. “SOI-Supported Microdevice for Hydrogen Purification Using Palladium–Silver Membranes.” Journal of Microelectromechanical Systems 19.2 (2010): 402–409. Web. 5 Apr. 2012. © 2010 Institute of Electrical and Electronics Engineers
Version
Final published version
Abstract
High-purity hydrogen continues to receive attention
as a promising energy source for fuel cells in portable power applications.
On-demand hydrogen generation via fuel reforming offers
a convenient alternative to hydrogen storage, but the concomitant
CO generation is deleterious to the fuel cell catalyst. Of the possible
hydrogen purification options, palladium membranes allow
a compact design suitable for portable applications. We present
a micromembrane device built in silicon-on-insulator wafers for
hydrogen purification. The design imparts structural stability
to a submicrometer-thick palladium–silver membrane, enabling
hydrogen purification at higher pressures than were tolerated by
previous devices with supported thin palladium membranes. The
devices are manufactured using bulk micromachining techniques
including photolithography, plasma, and wet etching. They are operated
at pressures up to 2 atm with a correspondingly enhanced
hydrogen flux. In particular, thin (200 nm) palladium–silver membrane
yield high permeation rates of up to 50 mol/m²/s at 350 ◦C.
The different transport resistances controlling hydrogen permeation
in the micromembrane system are evaluated.
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Microsystems Technology Laboratories
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DOI of Published Version
https://doi.org/10.1109/jmems.2010.2041529
