Precision positioning using a novel six axes compliant nano-manipulator
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542_2016_Article_2931.pdf
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1.62 MB
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Author(s)
Akbari, Samin
Pirbodaghi, Tohid
Date Issued
April 2016
Journal
Microsystem Technologies
Publisher
Springer Berlin Heidelberg
Citation
Akbari, Samin, and Tohid Pirbodaghi. “Precision Positioning Using a Novel Six Axes Compliant Nano-Manipulator.” Microsystem Technologies (2016): n. pag.
Version
Author's final manuscript
Abstract
In this paper, a novel micro-scale nano-manipulator capable of positioning in six degrees of freedom (DOF) is introduced. Undesired deflections, while operating in a specific DOF, are restricted by the aid of distinctive design of flexure hinges and actuators’ arrangements. The compliant mechanism is actuated by thermo-electro-mechanical actuators, as they could be integrated and exert large forces in a nanometer resolution. The actuators are bidirectional capable of applying force in both transverse and longitudinal directions. Performance of the two degrees of freedom actuator is thoroughly explored via numerical and analytical analyses, showing a good agreement. The workspace and performance of the precision positioner is studied using finite element methods. Finally, identification of forward and inverse kinematic of the nano-manipulator is performed utilizing neural network concept. A well-trained and appropriate neural network can efficiently replace the time-consuming and complex analytical and experimental methods.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1007/s00542-016-2931-2
