The reaction of molecular fluorine with silicon(100) : adsorption, desorption, and scattering dynamics
Name
24079776-MIT.pdf
Size
64.35 MB
Format
Adobe PDF
Checksum (MD5)
5b4c6413d87c9bba47e7c10a3b2d79e6
Author(s)
Schulberg, Michelle Tobi.
Advisor(s)
Sylvia T. Ceyer.
Date Issued
1990
Publisher
Massachusetts Institute of Technology
Description
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1990
Includes bibliographical references.
Subjects
Chemistry
MIT Department
Massachusetts Institute of Technology. Department of Chemistry
Terms of Use
MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided.
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