Effects of high temperature treatment on curl and microstructure of heavily boron-doped silicon
Name
37863459-MIT.pdf
Description
Full printable version
Size
13.37 MB
Format
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Checksum (MD5)
af84becf1e5759189fb794a2d3d2cb4a
Author(s)
Bruce, Denise M. (Denise Marie)
Advisor(s)
Kaplesh Kumar.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.
Includes bibliographical references (leaves 109-110).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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