High-accuracy, speed-optimized positioning system for electron beam lithography
Name
11836111-MIT.pdf
Size
20.38 MB
Format
Adobe PDF
Checksum (MD5)
c890dc00c037465130cd2aeb27a34311
Author(s)
Dadok, Luděk.
Advisor(s)
James K. Roberge.
Date Issued
1982
Publisher
Massachusetts Institute of Technology
Description
Thesis: M.S., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 1982
Vita.
Includes bibliographical references.
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided.
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