Development of Fine Motion Stages for Six Degree-of-Freedom Submicron Positioning
Name
Frejowski-tfrej-smme-meche-2021-thesis.pdf
Description
Thesis PDF
Size
248.97 MB
Format
Adobe PDF
Checksum (MD5)
f17cca0d132860a849fb80bfcfe89f49
Author(s)
Frejowski, Tom
Advisor(s)
Slocum, Alexander H.
Date Issued
September 2021
Publisher
Massachusetts Institute of Technology
Abstract
Submicron positioning stages are an invaluable tool in a variety of high precision applications including microscopy, optics, micromachining, and photolithography. This thesis covers the development and testing of a mechanical fine motion stage that uses a novel configuration of precision ballscrews and flexures to produce controlled motion in 6 degrees of freedom. The stage is designed to be capable of submicron repeatability within a range of motion that spans ยฑ0.1 mm in ๐ฅ and ๐ฆ, ยฑ1.5 mm in ๐ง, ยฑ1 mrad in ๐โ and ๐แตง, and ยฑ52 mrad in ๐ subscript ๐ง.
A full system architecture for controlling the stage and evaluating its performance is developed in this work. This includes the design of a metrology system using low cost position sensors for monitoring the position and orientation of the stage.
Tests show the repeatability of the stage to be on the order of 0.4 ยตm in ๐ฅ and ๐ฆ, 25 nm in ๐ง and on the microradian level for the rotational degrees of freedom, with room for improvement in all degrees of freedom through the use of endpoint feedback and higher resolution sensors. Frequency response measurements show that the dynamics of the stage with a 3 kg payload are well behaved to at least 170 Hz, which indicates that closed loop bandwidths up this frequency are readily achievable.
In addition, this thesis presents practical considerations for the structural design and actuator integration of an electromagnetically levitated fine motion stage.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
In Copyright - Educational Use Permitted
Copyright MIT
Persistent DSpace Link
