Direct-Write Photolithography for Cylindrical Tooling Fabrication in Roll-to-Roll Microcontact Printing
Name
Hardt_Direct-write.pdf
Size
3.26 MB
Format
Adobe PDF
Checksum (MD5)
9062ffb1cf83ea7697428794fdaca958
Author(s)
Nietner, Larissa Franciska
Hardt, David E.
Date Issued
June 2015
Journal
Journal of Micro and Nano-Manufacturing
Publisher
American Society of Mechanical Engineers (ASME)
Citation
Nietner, Larissa F., and David E. Hardt. “Direct-Write Photolithography for Cylindrical Tooling Fabrication in Roll-to-Roll Microcontact Printing.” Journal of Micro and Nano-Manufacturing 3.3 (2015): 031006. © 2015 ASME
Version
Final published version
Abstract
The scale-up of microcontact printing (μCP) to a roll-to-roll technique for large-scale surface patterning requires scalable tooling for continuous pattern printing with μm-scale features (e.g., 1–50 μm). Here, we examine the process of creating such a tool using an optical direct-write or “maskless” method working on a rotating cylindrical substrate. A predictive model of pattern formation is presented along with experimental results to examine the key control factors for this process. It is shown that factors can be modulated to vary the cross-sectional shape in addition to feature height and width. This feature can then be exploited to improve the robustness of the final printing process.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Massachusetts Institute of Technology. Laboratory for Manufacturing and Productivity
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1115/1.4030766
