On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams
Name
26408912-MIT.pdf
Size
42.97 MB
Format
Adobe PDF
Checksum (MD5)
846e862731990921e581a1de77e6cd5a
Author(s)
Vancauwenberghe, Olivier P. J.
Advisor(s)
Nicole Herbots.
Date Issued
1992
Publisher
Massachusetts Institute of Technology
Description
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 1992
Vita.
Includes bibliographical references (leaves 205-212).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
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