Sub-micron gate lithography in an MMIC production environment
Name
24154943-MIT.pdf
Description
Full printable version
Size
11.91 MB
Format
Adobe PDF
Checksum (MD5)
6b26ef852dee0a422d0b8add2de33074
Author(s)
Moran, Peter William
Advisor(s)
Rebecca M. Henderson and Jesús A. del Alamo.
Date Issued
1990
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1990, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1990.
Includes bibliographical references (leaves 195-197).
Subjects
Sloan School of Management
Electrical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering
Sloan School of Management
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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