Performance measurements of MEMS analysis system
Name
43558977-MIT.pdf
Description
Full printable version
Size
3.49 MB
Format
Adobe PDF
Checksum (MD5)
827ce4df0e9ddc64a27f478afcf114c0
Author(s)
Rodríguez, Ramón L. (Ramón Luis), 1976-
Advisor(s)
Donald E. Troxel.
Alternative Title
Performance measurements of micro electromechanical systems analysis system
Date Issued
1999
Publisher
Massachusetts Institute of Technology
Abstract
Designers and manufacturers of Micro Electromechanical Systems need accurate instruments to examine the mechanical properties of the devices they fabricate. The research presented in this thesis evaluate's the motion detection capabilities of a MEMS Analysis System. The thesis describes two motion detection schemes and the experiments that have been carried out to characterize them. It provides detailed analysis of the results, as well as suggestions as to how to improve each method. Most importantly, however, it establishes a framework in which future performance tests can be based on.
Description
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
Includes bibliographical references (leaves 89-90).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
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