Enhancing MEMS design using statistical process information
Name
46874954-MIT.pdf
Description
Full printable version
Size
15.4 MB
Format
Adobe PDF
Checksum (MD5)
de51584c7413e5a555c54a67038cefac
Author(s)
Moyne, William P. (William Patrick)
Advisor(s)
Duane S. Boning and Donald E. Troxel.
Alternative Title
Enhancing micro electro-mechanical systems design using statistical process information
Date Issued
2000
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.
Includes bibliographical references (p. 145-148).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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