Measurement of adhesion and mechanical properties of thin films using microfabricated structures

Allen, Mark George

Measurement of adhesion and mechanical properties of thin films using microfabricated structures

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Author(s)

Allen, Mark George

Advisor(s)

Stephen D. Senturia.

Date Issued

1989

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1989.

Includes bibliographical references (leaves 188-193).

Subjects

Chemical Engineering.

MIT Department

Massachusetts Institute of Technology. Department of Chemical Engineering

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http://hdl.handle.net/1721.1/14329