Variation reduction in a wafer fabrication line through inspection optimization
Name
37863465-MIT.pdf
Description
Full printable version
Size
3.97 MB
Format
Adobe PDF
Checksum (MD5)
399986580bfbb42ba74866ebc6687eb7
Author(s)
Bean, John W. (John Wellard)
Advisor(s)
Tom Eagar, Roy Welsch.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997, and Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1997.
Includes bibliographical references (p. 44).
Subjects
Materials Science and Engineering
Sloan School of Management
MIT Department
Sloan School of Management
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
Persistent DSpace Link
