Scheduling of Batch Processors in Semiconductor Manufacturing – A Review
Name
IMST021.pdf
Size
353.77 KB
Format
Adobe PDF
Checksum (MD5)
41baef98ec95da29413e1dac2c3e7711
Author(s)
Mathirajan, M.
Appa Iyer, Sivakumar
Date Issued
January 2003
Series/Report no.
Innovation in Manufacturing Systems and Technology (IMST);
Abstract
In this paper a review on scheduling of batch processors (SBP) in semiconductor manufacturing (SM) is presented. It classifies SBP in SM into 12 groups. The suggested classification scheme organizes the SBP in SM literature, summarizes the current research results for different problem types. The classification results are presented based on various distributions and various methodologies applied for SBP in SM are briefly highlighted. A comprehensive list of references is presented. It is hoped that, this review will provide a source for other researchers/readers interested in SBP in SM research and help simulate further interest.
Subjects
scheduling
batch processor
semiconductor manufacturing system
review
classification
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