Progress in fabrication of waveguide spatial light modulators via femtosecond laser micromachining
Author(s)
Moebius, Michael
Mazur, Eric
Savidis, Nickolaos
Jolly, Sunny
Datta, Bianca
Karydis, Thrasyvoulos
Gershenfeld, Neil A
Bove, V. Michael, Jr.
Date Issued
January 2017
Journal
Proceedings Volume 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X
Publisher
SPIE
Citation
Savidis, Nickolaos, et al. "Progress in Fabrication of Waveguide Spatial Light Modulators via Femtosecond Laser Micromachining." Proceedings Volume 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 28 January - February 2, 2017, San Francisco, California, edited by Georg von Freymann et al., 2017, SPIE, p. 101150R. © 2017 SPIE
Version
Final published version
Abstract
We have previously introduced a femtosecond laser micromachining-based scheme for the fabrication of anisotropic waveguides in lithium niobate for use in a guided-wave acousto-optic spatial light modulator. This spatial light modulation scheme is extensible to off-plane waveguide holography via the integration of a Bragg reflection grating. In this paper, we present femtosecond laser-based direct-write approaches for the fabrication of (1) waveguide in-coupling gratings and (2) volume Bragg reflection gratings via permanent refractive index changes within the lithium niobate substrate. In combination with metal surface-acoustic-wave transducers, these direct-write approaches allow for complete fabrication of a functional spatial light modulator via femtosecond laser direct writing. Keywords: guided-wave acousto-optics, femtosecond laser micromachining, laser-written waveguides, laser-written gratings, lithium niobate, volume gratings
MIT Department
Massachusetts Institute of Technology. Center for Bits and Atoms
Massachusetts Institute of Technology. Media Laboratory
Program in Media Arts and Sciences (Massachusetts Institute of Technology)
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1117/12.2250596
