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  5. Reactive chemisorption of molecular fluorine on Si(100)

Reactive chemisorption of molecular fluorine on Si(100)

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Author(s)
McGonigal, Marianne.
Advisor(s)
Sylvia T. Ceyer.
Date Issued
1989
Publisher
Massachusetts Institute of Technology
Description
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1989
Includes bibliographical references (leaves 215-217).
Subjects
Chemistry.
MIT Department
Massachusetts Institute of Technology. Department of Chemistry
Terms of Use
MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided.
http://dspace.mit.edu/handle/1721.1/7582
Persistent DSpace Link
https://hdl.handle.net/1721.1/130998
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