Repository logo
Log in(current)
Repository logoMIT Open ScholarshipDSpace@MIT
  1. Home
  2. MIT Libraries
  3. MIT Theses
  4. Doctoral Theses
  5. Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films

Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films

Thumbnail Image
Download
Name

41063028-MIT.pdf

Description
Full printable version
Size

16.21 MB

Format

Adobe PDF

Checksum (MD5)

472fe8c1d5c5908e16285712f31e3ae8

Author(s)
Kwan, Michael Chiu, 1969-
Advisor(s)
Karen K. Gleason.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997.
Includes bibliographical references.
Subjects
Chemical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Terms of Use
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Persistent DSpace Link
http://hdl.handle.net/1721.1/46199
Repository logo
PrivacyPermissionsAccessibilityContact us
Repository logo
Notify us about copyright concerns.