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Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films

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Author(s)
Kwan, Michael Chiu, 1969-
Advisor(s)
Karen K. Gleason.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997.
Includes bibliographical references.
Subjects
Chemical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
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