Quantitative modelling for optimization of the Czochralski growth of silicon

Kinney, Thomas Arthur

Quantitative modelling for optimization of the Czochralski growth of silicon

Download

Name

26714193-MIT.pdf

Description

Full printable version

Size

22.55 MB

Format

Adobe PDF

Checksum (MD5)

3af3bea7d2166e61b4ab806e103f6208

Author(s)

Kinney, Thomas Arthur

Advisor(s)

Robert A. Brown.

Date Issued

1992

Publisher

Massachusetts Institute of Technology

Description

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.

Includes bibliographical references (p. 279-296).

Subjects

Chemical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Chemical Engineering

Terms of Use

M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

http://dspace.mit.edu/handle/1721.1/7582

Persistent DSpace Link

http://hdl.handle.net/1721.1/13204