Focused Ion Beam Fabrication
Name
RLE_PR_128_03.pdf
Size
199.27 KB
Format
Adobe PDF
Checksum (MD5)
5d23707da347ec82277c90dd051f1e48
Author(s)
Musil, Christian
Melngailis, John
Stevens, Eugene H.
Bartelt, John
Utlaut, Mark
Post, Richard
Kellog, Edwin
Geiss, Michael W.
Mountain, Robert W.
Shedd, Gordon M.
Date Issued
January 1986
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 128
Description
Contains summary of research program and reports on four research projects.
Terms of Use
Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
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