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  4. RLE Progress Report, No. 132 (1989)
  5. Submicron Structures Technology and Research

Submicron Structures Technology and Research

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RLE_PR_132_01_01s_01.pdf

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Author(s)
Smith, Henry I.
•
Burkhardt, Martin
•
Carter, James M.
•
Chu, William
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Early, Kathleen R.
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Ghanbari, Reza A.
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Ku, Yao-Ching
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Moel, Alberto
•
Quek, Hui Meng
•
Schattenburg, Mark L.
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Date Issued
1989-01-01 to 1989-12-31
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 132
Description
Contains table of contents for Part I, table of contents for Section 1 and reports on thirteen research projects.
Terms of Use
Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
Persistent DSpace Link
http://hdl.handle.net/1721.1/57116
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