Sub-15-nm nanoimprint molds and pattern transfer
Name
Berggren_Sub-15-nm nanoimprint.pdf
Size
559.93 KB
Format
Adobe PDF
Checksum (MD5)
3e3c68818d1522f7d605e72f61e3a1fe
Author(s)
Morecroft, Debbie
Yang, Joel K. W.
Schuster, S.
Berggren, Karl K.
Xia, Qiangfei
Wu, Wei
Williams, R. Stanley
Date Issued
December 2009
Journal
Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures
Publisher
American Institute of Physics
Citation
Morecroft, Debbie et al. “Sub-15 nm nanoimprint molds and pattern transfer.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 27.6 (2009): 2837.
Version
Original manuscript
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Research Laboratory of Electronics
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike
Persistent DSpace Link
DOI of Published Version
http://dx.doi.org/10.1116/1.3264670
