Modeling of chemical mechanical polishing for shallow trench isolation
Name
46842506-MIT.pdf
Description
Full printable version
Size
4.95 MB
Format
Adobe PDF
Checksum (MD5)
9827bbbfea19814006c85fbe052f64db
Author(s)
Gan, Terence (Terence Chihkiong), 1975-
Advisor(s)
Duane S. Boning.
Date Issued
2000
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.
Includes bibliographical references (p. 75-77).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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