Focused Ion Beam Microfabrication
Name
RLE_PR_134_01_01s_06.pdf
Size
513.35 KB
Format
Adobe PDF
Checksum (MD5)
b36eb67bff4825bf9cfeddda071edbda
Author(s)
Melngailis, John
Lezec, Henri J.
Musil, Christian R.
Mahoney, Leonard J.
Chu, Alex
Chu, Larry
Antoniadis, Dimitri A.
Vignaud, Dominique
Liao, Kenneth S.
Shimase, Akira
Date Issued
1991-01-01 to 1991-12-31
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 134
Description
Contains an introduction, reports on seven research projects and a list of publications.
Terms of Use
Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
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