Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces
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applsci-06-00250.pdf
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4.51 MB
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Author(s)
Pinilla-Cienfuegos, Elena
Mañas-Valero, Samuel
Tatay, Sergio
Forment-Aliaga, Alicia
Coronado, Eugenio
Navarro Moratalla, Efren Adolfo
Date Issued
September 2016
Journal
Applied Sciences
Publisher
MDPI AG
Citation
Pinilla-Cienfuegos, Elena et al. "Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces." Applied Sciences 6, 9 (September 2016): 50 © 2016 The Authors
Version
Final published version
Abstract
The integration of atomically-thin layers of two dimensional (2D) materials in nanodevices demands for precise techniques at the nanoscale permitting their local modification, structuration or resettlement. Here, we present the use of Local Oxidation Nanolithography (LON) performed with an Atomic Force Microscope (AFM) for the patterning of nanometric motifs on different metallic Transition Metal Dichalcogenides (TMDCs). We show the results of a systematic study of the parameters that affect the LON process as well as the use of two different modes of lithographic operation: dynamic and static. The application of this kind of lithography in different types of TMDCs demonstrates the versatility of the LON for the creation of accurate and reproducible nanopatterns in exfoliated 2D-crystals and reveals the influence of the chemical composition and crystalline structure of the systems on the morphology of the resultant oxide motifs.
MIT Department
Massachusetts Institute of Technology. Department of Physics
MIT Materials Research Laboratory
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DOI of Published Version
https://doi.org/10.3390/app6090250
