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Modeling, optimization, and control of spatial uniformity in manufacturing processes

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Author(s)
Guo, Ruey-Shan
Advisor(s)
Emanuel Sachs.
Date Issued
1991
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1991.
Includes bibliographical references (leaves 105-109).
Subjects
Mechanical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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