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  5. Modeling, optimization, and control of spatial uniformity in manufacturing processes

Modeling, optimization, and control of spatial uniformity in manufacturing processes

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Author(s)
Guo, Ruey-Shan
Advisor(s)
Emanuel Sachs.
Date Issued
1991
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1991.
Includes bibliographical references (leaves 105-109).
Subjects
Mechanical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
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http://hdl.handle.net/1721.1/13459
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