Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks
Author(s)Li, L.; Zheng, J.; Lu, M.; Stein, A.; Ruggiero, C. A.; Salzman, J.; Kalish, R.; Bayn, Igal; Mouradian, Sara L.; Goldstein, Jordan A.; Schroder, Tim; Chen, Edward H.; Gaathon, Ophir; Englund, Dirk Robert; ... Show more Show less
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A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q = 2.51 × 10[superscript 6]) photonic crystal cavities with low mode volume (V[subscript m] = 1.062 × (λ/n)[superscript 3]), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q = 3 × 10[superscript 3].
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Media Laboratory; Massachusetts Institute of Technology. Research Laboratory of Electronics
Applied Physics Letters
American Institute of Physics (AIP)
Bayn, I., S. Mouradian, L. Li, J. A. Goldstein, T. Schroder, J. Zheng, E. H. Chen, et al. “Fabrication of Triangular Nanobeam Waveguide Networks in Bulk Diamond Using Single-Crystal Silicon Hard Masks.” Applied Physics Letters 105, no. 21 (November 24, 2014): 211101.