A general methodology for assessing and characterizing variation in semiconductor manufacturing

Author(s)
Stine, Brian E. (Brian Eugene), 1971-
Thumbnail
DownloadFull printable version (14.62Mb)
Advisor
Duane S. Bonging, James E. Chung.
Terms of use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
Metadata
Show full item record
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
 
Includes bibliographical references (leaves 186-192).
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/10045
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
Collections