Pattern effects in rapid thermal processing
Author(s)
Hebb, Jeffrey Paul
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Advisor
Klavs F. Jensen.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. Includes bibliographical references (p. 181).
Date issued
1997Department
Massachusetts Institute of Technology. Department of Mechanical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering