SIMOX buried-oxide conduction mechanisms

Author(s)
Krska, Jee-Hoon Yap
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Alternative title
Separation-by-implamentation-of oxygen buried-oxide conduction mechanims
Advisor
James E. Chung.
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
 
Includes bibliographical references (leaves 141-149).
 
Date issued
1997
URI
http://hdl.handle.net/1721.1/10309
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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