| dc.contributor.advisor | David M. Parks. | en_US |
| dc.contributor.author | Van Arsdell, William W. (William Walker) | en_US |
| dc.date.accessioned | 2005-08-18T20:40:05Z | |
| dc.date.available | 2005-08-18T20:40:05Z | |
| dc.date.copyright | 1997 | en_US |
| dc.date.issued | 1997 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/10439 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. | en_US |
| dc.description | Includes bibliographical references. | en_US |
| dc.description.statementofresponsibility | by Wiliam W. Van Arsdell. | en_US |
| dc.format.extent | 285 leaves | en_US |
| dc.format.extent | 16540771 bytes | |
| dc.format.extent | 16540526 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Mechanical Engineering | en_US |
| dc.title | Subcritical crack growth in polysilicon MEMS | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 37639445 | en_US |
