| dc.contributor.advisor | Charles G. Sodini. | en_US |
| dc.contributor.author | Lutsky, Joseph J. (Joseph Joachim) | en_US |
| dc.date.accessioned | 2005-08-18T20:45:40Z | |
| dc.date.available | 2005-08-18T20:45:40Z | |
| dc.date.copyright | 1997 | en_US |
| dc.date.issued | 1997 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/10450 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. | en_US |
| dc.description | Includes bibliographical references (p. 179-185). | en_US |
| dc.description.statementofresponsibility | by Joseph J. Lutsky. | en_US |
| dc.format.extent | 199 p. | en_US |
| dc.format.extent | 18418534 bytes | |
| dc.format.extent | 18418290 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | A sealed cavity thin-film acoustic resonator process for RF bandpass filters | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 37649729 | en_US |
