Plasma oxidation of silicon : kinetics studies
Author(s)
Chan, David Tai Wai
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Other Contributors
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Advisor
L.R. Reif.
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Metadata
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984. MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING. Includes bibliographical references.
Date issued
1984Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.