Micromachined infrared detector using wafer bonding technology
Name
36057543-MIT.pdf
Description
Full printable version
Size
18.92 MB
Format
Adobe PDF
Checksum (MD5)
3060a2390aac0df44a6f4196abad9308
Author(s)
Devoto, Roberto J
Advisor(s)
Martin A. Schmidt.
Date Issued
1996
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
Includes bibliographical references (p. 193-196).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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