| dc.contributor.advisor | Duane S. Boning. | en_US |
| dc.contributor.author | Gower, Aaron E. (Aaron Elwood) | en_US |
| dc.date.accessioned | 2005-08-18T17:30:57Z | |
| dc.date.available | 2005-08-18T17:30:57Z | |
| dc.date.copyright | 1996 | en_US |
| dc.date.issued | 1996 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/10647 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. | en_US |
| dc.description | Includes bibliographical references (p. 72-74). | en_US |
| dc.description.statementofresponsibility | by Aaron E. Gower. | en_US |
| dc.format.extent | 127 p. | en_US |
| dc.format.extent | 7145147 bytes | |
| dc.format.extent | 7144904 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 36270323 | en_US |
