| dc.contributor.advisor | Stephen Graves. | en_US |
| dc.contributor.author | Johal, Sumer S. (Sumer Singh) | en_US |
| dc.date.accessioned | 2005-08-18T15:02:49Z | |
| dc.date.available | 2005-08-18T15:02:49Z | |
| dc.date.copyright | 1996 | en_US |
| dc.date.issued | 1996 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/10889 | |
| dc.description | Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. | en_US |
| dc.description | Includes bibliographical references (p. 140). | en_US |
| dc.description.statementofresponsibility | by Sumer S. Johal. | en_US |
| dc.format.extent | 146 p. | en_US |
| dc.format.extent | 9399974 bytes | |
| dc.format.extent | 9399726 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | A simulation-based study of the cost and performance trade-offs in a semiconductor IC manufacturing facility | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.Eng. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 35560141 | en_US |
