Feedback control of organometallic vapor-phase epitaxial growth of aluminum gallium arsenide devices
Author(s)
Warnick, Sean C. (Sean Charles)
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Advisor
Munther A. Dahleh.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. Includes bibliographical references (leaves 67-69).
Date issued
1995Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science