Sputter deposition of aluminum nitride for applications in thin-film resonators

Author(s)
Naik, Rajan Sharad
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Advisor
L. Rafael Reif.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
 
Includes bibliographical references (leaf 43).
 
Date issued
1996
URI
http://hdl.handle.net/1721.1/11242
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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