Design and implementation of cantilever probe holder for tapping mode atomic force microscopy

Abstract

In this thesis, I present the design and implementation of a novel cantilever probe holder that is capable of tapping mode operation. The probe holder is implemented in a previously designed high-speed, large-range atomic force microscope (AFM). This AFM used a cantilever probe holder that was only capable of contact mode operation, placing limitations on imaging speed and increasing the risk of probe tip damage. Therefore, the focus of this thesis presents the improved design of a cantilever probe holder that actuates and utilizes probe dynamics. This will allow for more flexible and sustainable use of the AFM system. Additionally, two versions of this improved design are developed for operation in air and in liquid. Classical plate theory, finite element analysis (FEA), and non-parametric system identification are used to validate the structure dynamics of the cantilever probe holder.