Low-loss photonic device in Ge–Sb–S chalcogenide glass
Author(s)Novak, Spencer; Richardson, Kathleen; Du, Qingyang; Huang, Yizhong; Li, Junying; Kita, Derek M.; Michon, Jerome; Lin, Hongtao; Li, Lan; Zhang, Wei; Hu, Juejun; ... Show more Show less
MetadataShow full item record
Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge₂₃Sb₇S₇₀ chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (𝑄-factor) of 1.2×10⁶ were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices.
DepartmentMassachusetts Institute of Technology. Department of Materials Science and Engineering
Optical Society of America
Du, Qingyang et al. “Low-Loss Photonic Device in Ge–Sb–S Chalcogenide Glass.” Optics Letters 41, 13 (June 2016): 3090-3093 © 2016 Optical Society of America
Author's final manuscript