In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition

Author(s)
Salim, Sateria
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Advisor
Klavs F. Jensen.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.
 
Includes bibliographical references (leaves 179-186).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/11378
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
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