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dc.contributor.advisorKlavs F. Jensen.en_US
dc.contributor.authorSalim, Sateriaen_US
dc.date.accessioned2005-08-17T18:00:09Z
dc.date.available2005-08-17T18:00:09Z
dc.date.copyright1995en_US
dc.date.issued1995en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/11378
dc.descriptionThesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.en_US
dc.descriptionIncludes bibliographical references (leaves 179-186).en_US
dc.description.statementofresponsibilityby Sateria Salim.en_US
dc.format.extent187 leavesen_US
dc.format.extent11353678 bytes
dc.format.extent11353436 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectChemical Engineeringen_US
dc.titleIn-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor depositionen_US
dc.typeThesisen_US
dc.description.degreePh.D.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Dept. of Chemical Engineeringen_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Chemical Engineering
dc.identifier.oclc33222409en_US


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