In-situ wafer uniformity estimation using principal component analysis and function approximation methods

Author(s)
White, David A. (David Allan), 1966-
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Michael Athans.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
 
Includes bibliographical references (leaves 66-71).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/11456
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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