| dc.contributor.advisor | Alexander Slocum. | en_US |
| dc.contributor.author | Van Doren, Matthew J., 1967- | en_US |
| dc.date.accessioned | 2005-08-17T19:01:25Z | |
| dc.date.available | 2005-08-17T19:01:25Z | |
| dc.date.copyright | 1995 | en_US |
| dc.date.issued | 1995 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/11496 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. | en_US |
| dc.description | Vita. | en_US |
| dc.description | Includes bibliographical references (p. 293-301). | en_US |
| dc.description.statementofresponsibility | by Matthew James Van Doren. | en_US |
| dc.format.extent | 303 p. | en_US |
| dc.format.extent | 19644134 bytes | |
| dc.format.extent | 19643890 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Mechanical Engineering | en_US |
| dc.title | Precision machine design for the semiconductor equipment manufacturing industry | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 33434802 | en_US |
