A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage

Author(s)
Chen, Kuo-Shen, 1966-
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Advisor
David L. Trumper.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
 
Includes bibliographical references.
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/11506
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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