| dc.contributor.advisor | Henry I. Smith. | en_US |
| dc.contributor.author | Hector, Scott D. (Scott Daniel) | en_US |
| dc.date.accessioned | 2005-08-16T23:03:03Z | |
| dc.date.available | 2005-08-16T23:03:03Z | |
| dc.date.copyright | 1994 | en_US |
| dc.date.issued | 1994 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/11617 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. | en_US |
| dc.description | Includes bibliographical references (leaves 263-274). | en_US |
| dc.description.statementofresponsibility | by Scott D. Hector. | en_US |
| dc.format.extent | 274 leaves | en_US |
| dc.format.extent | 21256978 bytes | |
| dc.format.extent | 21256732 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 32052989 | en_US |
