The role of surface and bulk perfection in the processing and performance of crystalline silicon
Author(s)
M'saad, Hichem
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Advisor
L.C. Kimerling.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994. Includes bibliographical references (leaves 203-219).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering