Pattern dependencies in the plasma etching of polysilicon
Author(s)
Dalton, Timothy Joseph
DownloadFull printable version (32.01Mb)
Advisor
Herbert H. Sawin.
Terms of use
Metadata
Show full item recordDescription
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994. Includes bibliographical references (p. 423-441).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Chemical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering