Geometric simulation of microfabricated structures
Author(s)
Harris, Robert Michael
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Advisor
Stephen D. Senturia.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. Includes bibliographical references (p. 295-302).
Date issued
1995Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science