A thin-film silicon microaccelerometer fabricated using electrochemical etch-stop and wafer bonding technology
Author(s)
McNeil, Vincent Maurice
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Advisor
Martin A. Schmidt.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. Includes bibliographical references (p. 343-360).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science